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    Spin Coater And Developer

    產(chǎn)品品牌

    JAC

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     品牌：JAC

    應(yīng)用領(lǐng)域：IC FAB

    設(shè)備特點(diǎn)：

    This is a higher throughput, upgraded version of the highly regarded, highly reliable platform with additional features not available on the original. JAC has a flexible system design to support immersion ArF lithography processes, including top-coat coating and removal. JAC immersion option package incorporates SOKUDO’s unique wafer clean and dry technology which is particularly useful in preventing defects in immersion process.

     

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