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    砷化鎵 GaAs Wafers

    應(yīng)用于半導(dǎo)體行業(yè)：

    半導(dǎo)體原材料-晶片—襯底類-砷化鎵

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    Standard Dimensions and Tolerances for 150mm Diameter GaAs Wafers

     

    Property

    Dimension

    Tolerance

    Units

    Diameter

    150

    +/- 0.5

    mm

    Thickness, Center Point
     
     
     

    Option A

    675

    +/- 25

    µm

    Option B

    550

    +/- 25

    µm

    Notch Orientation

    [010]

    +/- 2

    degrees

    Notch Depth

    1

    +0.25/-0.0

    mm


     

    Standard Dimensions and Tolerances for 100mm Diameter GaAs Wafers

    Property Dimension Tolerance Units
    Diameter 100 +/- 0.5 mm
    Thickness, Center Point 675 +/- 25 µm
    Primary Flat Lenght 32.5 +/- 2 mm
    Secondary Flat Lenght 18 +/- 2 mm

    US/SEMI and E/J-Flat-Option available

    Standard Dimensions and Tolerances for 200mm Diameter GaAs Wafers

    Property Dimension Tolerance Units
    Diameter 200 +/- 0.5 mm
    Thickness, Center Point 625 +/- 25 µm
    Notch Orientation [010] +/- 2 degrees
    Notch Depth 1 +0.25/-0.0 mm


     

     

    Standard Dimensions and Tolerances for 3inch Diameter GaAs Wafers

    Property Dimension Tolerance Units
    Diameter 76.2 +/- 0.5 mm
    Thickness, Center Point 625 +/- 25 µm
    Primary Flat Lenght 22 +/- 2 mm
    Secondary Flat Lenght 11 +/- 2 mm

    US/SEMI and E/J-Flat-Option available

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