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    NanoCalc 反射膜厚測量系統(tǒng)

    應(yīng)用于半導(dǎo)體行業(yè):

    半導(dǎo)體測試設(shè)備-測厚設(shè)備-其他

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    100

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    中國-北京市

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    所屬系列:半導(dǎo)體測試設(shè)備-測厚設(shè)備-其他

    NanoCalc 反射膜厚測量系統(tǒng)

    膜厚測量 薄膜的光學(xué)特性主要有反射和干涉。NanoCalc薄膜反射測量系統(tǒng)可以用來進(jìn)行10nm -250um的膜厚分析測量,對單層膜的分辨率為0.1nm。根據(jù)測量軟件的不同,在1秒鐘內(nèi)可以分析單層或最多達(dá)到10層的膜厚。

     

    產(chǎn)品特點(diǎn)

    • 可分析單層或多層薄膜;
    • 分辨率達(dá)0.1nm;
    • 適合于在線監(jiān)測;

    使用原理

    最常用的兩種測量薄膜的特性的方法為光學(xué)反射和投射測量、橢圓光度法測量。NanoCalc利用反射原理,通過測量寬光譜范圍內(nèi)的反射率曲線來進(jìn)行膜厚測量。

    查找n和k值

    可以進(jìn)行多達(dá)十層的薄膜測量,薄膜和基體材質(zhì)可以是金屬、電介質(zhì)、無定形材料或硅晶等。NanoCalc軟件包含了大多數(shù)材料的n和k值數(shù)據(jù)庫,用戶也可以自己添加和編輯。

     

      膜厚測量

    應(yīng)用

    NanoCalc薄膜反射材料系統(tǒng)適合于在線膜厚測量,包括氧化層、中氮化硅薄膜、感光膠片及其它類型的薄膜。NanoCalc也可測量在鋼、鋁、銅、陶瓷、塑料等物質(zhì)上的抗反射涂層、抗磨涂層等。

    NanoCalc Systems Available

    NANOCALC-2000-UV-VIS-NIR

    Wavelength:

    250-1100 nm

    Thickness:

    10 nm-70 um

    Light source:

    Deuterium and Tungsten Halogen

     

    NANOCALC-2000-UV-VIS

    Wavelength:

    250-850 nm

    Thickness:

    10 nm-20 um

    Light source:

    Deuterium and Tungsten Halogen

     

    NANOCALC-2000-VIS-NIR

    Wavelength:

    400-1100 nm

    Thickness:

    20 nm-10 um (optional 1 um-250 um)

    Light source:

    Tungsten Halogen

     

    NANOCALC-2000-VIS

    Wavelength:

    400-850 nm

    Thickness:

    50 nm-20 um

    Light source:

    Tungsten Halogen

     

    NANOCALC-2000-NIR

    Wavelength:

    650-1100 nm

    Thickness:

    70 nm-70 um

    Light source:

    Tungsten Halogen

     

    NANOCALC-2000-NIR-HR

    Wavelength:

    650-1100 nm

    Thickness:

    70 nm-70 um

    Light source:

    Tungsten Halogen

     

    NANOCALC-2000-512-NIR

    Wavelength:

    900-1700 nm

    Thickness:

    50 nm-200 um

    Light source:

    High-power Tungsten Halogen

    For Reflectometry applications, the following items are required:

    NC-2UV-VIS100-2

    Bifurcated UV fiber
    400 um x 2m
    2x SMA connectors
    Flexible metal jacketing

    NC-STATE

    Single point reflection measurement for non transparent samples

    Step-Wafer 5 Steps 0-500 mm, calibrated 4"

    If using a microscope, the following items are also needed:

    NC-7UV-VIS200-2

    Reflection probe for application microscopy with MFA-C-Mount

    Step-Wafer 5 Steps 0-500 mm, calibrated 4"

     

    NanoCalc Specifications

    Angle of incidence:

    90°

    Number of layers:

    3 or fewer

    Reference measurement needed:

    Yes (bare substrate)

    Transparent materials:

    Yes

    Transmission mode:

    Yes

    Rough materials:

    Yes

    Measurement speed:

    100 milliseconds to 1 second

    On-line possibilities:

    Yes

    Mechanical tolerance (height):

    With new reference or collimation (74-UV)

    Mechanical tolerance (angle):

    Yes, with new reference

    Microspot option:

    Yes, with microscope

    Vision option:

    Yes, with microscope

    Mapping option:

    6" and 12" XYZ mapping tables

    Vacuum possibilities:

    Yes

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