服務(wù)熱線
4001027270
NanoCalc 反射膜厚測量系統(tǒng)
薄膜的光學(xué)特性主要有反射和干涉。NanoCalc薄膜反射測量系統(tǒng)可以用來進(jìn)行10nm -250um的膜厚分析測量,對單層膜的分辨率為0.1nm。根據(jù)測量軟件的不同,在1秒鐘內(nèi)可以分析單層或最多達(dá)到10層的膜厚。 |
產(chǎn)品特點(diǎn)
使用原理
最常用的兩種測量薄膜的特性的方法為光學(xué)反射和投射測量、橢圓光度法測量。NanoCalc利用反射原理,通過測量寬光譜范圍內(nèi)的反射率曲線來進(jìn)行膜厚測量。
查找n和k值 可以進(jìn)行多達(dá)十層的薄膜測量,薄膜和基體材質(zhì)可以是金屬、電介質(zhì)、無定形材料或硅晶等。NanoCalc軟件包含了大多數(shù)材料的n和k值數(shù)據(jù)庫,用戶也可以自己添加和編輯。
|
---|
應(yīng)用
NanoCalc薄膜反射材料系統(tǒng)適合于在線膜厚測量,包括氧化層、中氮化硅薄膜、感光膠片及其它類型的薄膜。NanoCalc也可測量在鋼、鋁、銅、陶瓷、塑料等物質(zhì)上的抗反射涂層、抗磨涂層等。
NANOCALC-2000-UV-VIS-NIR |
|
Wavelength: |
250-1100 nm |
Thickness: |
10 nm-70 um |
Light source: |
Deuterium and Tungsten Halogen |
NANOCALC-2000-UV-VIS |
|
Wavelength: |
250-850 nm |
Thickness: |
10 nm-20 um |
Light source: |
Deuterium and Tungsten Halogen |
NANOCALC-2000-VIS-NIR |
|
Wavelength: |
400-1100 nm |
Thickness: |
20 nm-10 um (optional 1 um-250 um) |
Light source: |
Tungsten Halogen |
NANOCALC-2000-VIS |
|
Wavelength: |
400-850 nm |
Thickness: |
50 nm-20 um |
Light source: |
Tungsten Halogen |
NANOCALC-2000-NIR |
|
Wavelength: |
650-1100 nm |
Thickness: |
70 nm-70 um |
Light source: |
Tungsten Halogen |
NANOCALC-2000-NIR-HR |
|
Wavelength: |
650-1100 nm |
Thickness: |
70 nm-70 um |
Light source: |
Tungsten Halogen |
NANOCALC-2000-512-NIR |
|
Wavelength: |
900-1700 nm |
Thickness: |
50 nm-200 um |
Light source: |
High-power Tungsten Halogen |
NC-2UV-VIS100-2 |
Bifurcated UV fiber |
NC-STATE |
Single point reflection measurement for non transparent samples |
Step-Wafer | 5 Steps 0-500 mm, calibrated 4" |
NC-7UV-VIS200-2 |
Reflection probe for application microscopy with MFA-C-Mount |
Step-Wafer | 5 Steps 0-500 mm, calibrated 4" |
Angle of incidence: |
90° |
Number of layers: |
3 or fewer |
Reference measurement needed: |
Yes (bare substrate) |
Transparent materials: |
Yes |
Transmission mode: |
Yes |
Rough materials: |
Yes |
Measurement speed: |
100 milliseconds to 1 second |
On-line possibilities: |
Yes |
Mechanical tolerance (height): |
With new reference or collimation (74-UV) |
Mechanical tolerance (angle): |
Yes, with new reference |
Microspot option: |
Yes, with microscope |
Vision option: |
Yes, with microscope |
Mapping option: |
6" and 12" XYZ mapping tables |
Vacuum possibilities: |
Yes |
購買之前,如有問題,請向我們咨詢