Weight Around 1000kg With Microscope

•包含顯微鏡重量約1000公斤左右  

  Dimensions: 1000mmW*1400mmL*1400mmH   

•尺寸:  1000mm寬*1400mm長(zhǎng)*1400mm高

  6" /8’’/12’’ chuck with Central Vacuum Hole and Vacuum rings for Sample holding, Independent control of each Vacuum channel

•6" /8’’/12’’ 卡盤(pán)，采用中心真空吸附孔和多圈真空吸附環(huán)固定樣品，每個(gè)真空通道均獨(dú)立控制                                      

  Super low noise triaxial Chuck and output Triaxial adapter      

•卡盤(pán)為三軸超低噪聲結(jié)構(gòu)，電學(xué)獨(dú)立懸空，帶triaxial 電學(xué)接口      

  Chuck Flatness: 5µm                                                        

•卡盤(pán)平整度：5µm                                                             

  The Standard Central Vacuum hole is 1mm diameter,Can be customized according to customer requirements.                                                       

•標(biāo)準(zhǔn)卡盤(pán)中心吸附孔為1mm直徑，可以根據(jù)客戶要求定制                                         

  Chuck Quick roll out mechanism for fast wafer exchange                                            

•帶卡盤(pán)快速拉出機(jī)構(gòu)，便于快速更換樣品                                                             

  Probe Card and probe card holder are adaptable to the Platen                                   

•探針平臺(tái)可以加裝探針卡和針卡夾具                                                             

  Platen can load up to 12 pcs micropositioners when TopHat is removed                     

•在不安裝八角盒時(shí)探針平臺(tái)可以加裝最多12個(gè)針座                                             

  Sealled Microchamber with high performance EMI/light/noise Shielding and frost Prevent

•高性能密閉微暗室有效的屏蔽EMI，光線和噪聲同時(shí)保持干燥正壓環(huán)境下樣品在低溫時(shí)無(wú)結(jié)霜                                                           

EMI屏蔽 > 30 dB (typical) @ 1 kHz to 1 MHz                                                   

光衰減    ≥ 130 dB                                                      

光譜噪聲基底       ≤ -180 dBVrms/rtHz (≤ 1 MHz)                                                       

系統(tǒng)交流噪聲       ≤ 5 mVp-p (≤ 1 GHz)                                                

  Optimized Microchamber for less CDA consumption                                          

•微暗室優(yōu)化的腔體結(jié)構(gòu)可以極大的減少干燥氣體消耗量                                               

  Chuck X-Y-Z-Theta High Precison Motorised Stage and Controlling system                

•Chuck X-Y-Z-Theta 四軸高精度電動(dòng)移動(dòng)平臺(tái)和控制系統(tǒng)                                           

  Chuck Driver Mechanism:Zero baklash Design，grinded ball screw and Linear Guide rail

•卡盤(pán)驅(qū)動(dòng)機(jī)構(gòu):無(wú)回程差設(shè)計(jì)，研磨級(jí)循環(huán)滾珠絲杠和高精度導(dǎo)軌                         

  Motors:Low noise DC motor                                                          

•驅(qū)動(dòng)電機(jī):低噪直流電機(jī)驅(qū)動(dòng)                                                            

  0.1 μm resolution linear Scales for all chuck stage axies                                              

•每一個(gè)軸均帶0.1微米線性光柵尺                                                          

  Chuck X-Y-Z Travel Range:200mm*300mm*20mm                                                    

•Chuck X-Y-Z 三軸行程分別為200mm*300mm*20mm                                                

  Highest Speed:X/Y axis> 70mm/S,Z axis> 20mm/S                                                     

•最高移動(dòng)速度:X,Y軸>70mm/S，Z軸> 20mm/S                                                           

  Step Size: As small as 0.1µm in X，Y and Z                                                          

•X,Y,Z向運(yùn)動(dòng)解析度：最小為0.1微米                                                            

  Repeatability: +-1µm                                        

•往返重復(fù)精度:+-1µm                                          

  Accuracy: +-2µm                                              

•絕對(duì)定位精度:+-2µm                                   

  Chuck Theta Range:+-10°                          

• Chuck角度旋轉(zhuǎn)范圍+-10°                         

  Theta resolution:0.0001°                             

• Chuck角度旋轉(zhuǎn)精度：0.0001°                           

  Theta Repeatability: 0.0005°                        

•Theta往返重復(fù)精度:0.0005°                  

  Theta Accuracy: 0.001°                                                           

•Theta 絕對(duì)精度:0.001°                                                             

  Microscope X-Y-Z Motorised Stage and Controlling system                                       

•顯微鏡X-Y-Z 電動(dòng)移動(dòng)平臺(tái)和控制系統(tǒng)              

  Microscope X-Y-Z Travel 2" x 2" x 5"                                      

•可調(diào)節(jié)顯微鏡在 X-Y-Z三軸 2" x 2" x 5" 范圍內(nèi)電動(dòng)移動(dòng)        

  Highest Speed:> 10mm/S                                                              

•最高移動(dòng)速度:>10mm/S                                                           

  Step Size: As small as 0.1µm in X and Y                                                        

•移動(dòng)解析度：最小為0.1微米                                                          

  Repeatability: +-1µm                                                             

•往返重復(fù)精度:+-1µm                                                        

  Accuracy: +-2µm                                                            

•絕對(duì)定位精度:+-2µm                                                        

  Computer Interface: RS232/485,TCP/IP,GPIB etc.                                                        

•計(jì)算機(jī)連接端口:RS232/485,TCP/IP,GPIB 等                                                          

  High Perfomance Vibration Free Table built in Design                                   

•一體化的高性能防震系統(tǒng)      

Option   Joystick

              •手動(dòng)控制盒，帶操縱桿     

                Gold Plating For Chuck   

              •Chuck鍍金，具有更低的接觸電阻 

                5Bar High pressure gas purge design to prevent HV electric arc       

              •腔體內(nèi)5個(gè)大氣壓正壓氣體吹拂設(shè)計(jì)，有效避免高壓放電 

                HV Chuck 10KV      

              •耐高壓卡盤(pán) 10KV（帶高壓輸出接口）  

                HC Chuck 500A      

              •耐大電流卡盤(pán) 500A（帶kelvin大電流輸出接口）